EUV Resist Chemical Reaction Analysis using SR
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概要
- 論文の詳細を見る
The chemical reaction in EUV irradiation of the several photoacid generators (PAGs) which employed triphenylsulfonium (TPS) salts as the cation of PAG, is discussed on the basis of the analysis using the SR absorption spectroscopy in the soft x-ray region. The fluorine atoms of the anion PAGs which have the chemical structure of the imidate type such as TPS-Imidate-1, and TPS-Imidate-2 strongly decomposed under EUV exposure. In the case of these PAG type, it is found that in addition to the ionization reaction, the anion decomposition reaction originated by the photo excitation of the photoacid generator might occur under EUV exposures. Thus the sensitivity seemed to be high comparison to tri-phenylsulfonium perfluorobutanesulfonate (TPS-Nonaflate) under EUV exposure. In the case of tri-phenylsulfonium camphorsulfonate (TPS-Cs), the anion which does not contain fluorine seemed to be very stable under EUV exposure and the sensitivity is lower than TPS-Nonaflate.
- The Society of Photopolymer Science and Technology (SPST)の論文
著者
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Muramatsu Yasuji
Graduate School Of Engineering University Of Hyogo
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Harada Tetsuo
Center for EUV Lithography, Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Watanabe Takeo
Center for EUV Lithography, Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Center for EUV Lithography, Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Sato Kazufumi
Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa, Kanagawa 253-0114, Japan
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Ohmori Katsumi
Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa, Koza, Kanagawa 253-0114, Japan
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Shiono Daiju
Tokyo Ohka Kogyo
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Emura Kazuya
Center for EUVL, LASTI, University of Hyogo
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Haruyama Yuichi
Center for EUVL, LASTI, University of Hyogo
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Harada Tetsuo
Center for EUVL, LASTI, University of Hyogo
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Sato Kazufumi
Tokyo Ohka Kogyo
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