Quantitative and Fingerprint Analysis Method of Nitrogen in Graphitic Carbon Materials Using Total-Electron-Yield Soft X-ray Absorption Spectroscopy

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概要

• 論文の詳細を見る
• 2013-04-00

著者

• Gullikson Eric

  Center For X-ray Optics Lawrence Berkeley National Laboratory

• Muramatsu Yasuji

  Graduate School Of Engineering University Of Hyogo

• Amano Taiji

  Graduate School of Engineering, University of Hyogo, Himeji, Hyogo 671-2201, Japan

• Shirode Kensuke

  Graduate School of Engineering, University of Hyogo, Himeji, Hyogo 671-2201, Japan

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• Chemical Analysis of Impurity Boron Atoms in Diamond Using Soft X-Ray Emission Spectroscopy
• Soft X-ray absorption spectra in the CK region of carbon black and spectral analysis using the discrete variational Xα method
• Quantitative and chemical-state analyses of surface oxygen on graphite oxides using total-electron-yield soft X-ray absorption spectroscopy
• Quantitative and Fingerprint Analysis Method of Nitrogen in Graphitic Carbon Materials Using Total-Electron-Yield Soft X-ray Absorption Spectroscopy
• EUV Resist Chemical Reaction Analysis using SR
• EUV Resist Chemical Analysis by Soft X-ray Absorption Spectroscopy for High Sensitivity Achievement

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