UVレーザによる高アスペクト比小径穴あけ加工 (第5報)

概要

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High-aspect-ratio microdrilling demonstrated by the forth harmonic of nanosecond Nd:YVO4 laser. In this paper, we investigated the depths of the holes drilled in alumina, aluminum alloy, cemented carbide, high speed steel, silicon and stainless steel. Firstly, the depths of the holes drilled with the repetition rate of 1 kHz, 5 kHz, 10 kHz and 15 kHz, were measured. As a result, the deepest holes were drilled at the repetition rate of 10 kHz in all the materials. At the tip of the holes drilled in cemented carbide, high speed steel, silicon and stainless steel were blanched. The depths of the holes were 600 μm - 1400 μm. The range of the holes with the diameters less than 10 μm were measured, and aspect ratios were calculated. As a result aspect ratios of alumina, aluminum alloy, cemented carbide, high speed steel, silicon, and stainless steel were 104, 26, 17, 56, 64 and 55, respectively. No clear redepositon layer formed on the inner surface of silicon. Scanning electron microscope observation revealed that inner surface was not flat.