磁気中性点による散乱効果を用いたイオン源の基本特性

概要

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Two types of ion sources with a single magnetron injection gun-type-thermionic cathode were fabricated and tested. The cathode was positioned on the extended line of the cylindrical axis. These sources have magnetic multipole linecusps with different directions. One of them had azimuthally oriented magnetic field, and the other had axially oriented one. The measurement of ion current density and ion energy distribution revealed that the beam profile became a hollow-beam whose intensity increases in proportion to discharge current, and that the ion source with azially oriented magnetic field produces ion beams 450 times higher than those with azimuthally oriented magnetic field. Single extraction grid-ion source is also compared in extracted beam profile with the two grid-ion source.
日本真空協会の論文