Sliding Mode Control with Frequency-shaped Hyperplane for a Ball Screw Driving Stage
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概要
- 論文の詳細を見る
In a CNC Video Measuring System, both very-low-speed motion and high-speed motion are required. Very-low-speed motion is highly influenced by friction. Currently, PID control with look-up-table gains is used to handle with this problem. However, the process of developing this table tends to be a trial-and-error scheme. In the present paper, we investigate a model-based control system design. System identification techniques are used for constructing a model for a control system design and a sliding mode controller with a frequency-shaped hyperplane is designed using that model. Both strong attenuation of disturbances at low frequencies and stability at high frequencies are achieved in a real machine.
- 一般社団法人 日本機械学会の論文
著者
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Nonami Kenzo
Department For Electronics And Mechanical Engineering University Of Chiba
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YAMAUCHI Atsushi
Nikon Corporation
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HAKODA Fumihiko
Nikon Corporation
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SONE Yasuhiro
Nikon Corporation
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