加速電圧および取込み角を制御した反射電子像による低炭素鋼酸化スケール組織の物質情報と結晶方位情報の取分け

概要

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The behaviors of contrasts in backscattered electron (BSE) images of cross-sectional heat-treated steel are studied under various accelerating voltages and take-off angle conditions. Changes in these conditions resulted in dramatic changes in contrasts. Low accelerating voltages and low take-off angles improve surface information and channeling contrasts, whereas high accelerating voltages and high take-off angles enhance bulk information and reduce channeling contrasts, resulting in improved Z contrast. These behaviors can be understood by the ratio of LLE (Low-Loss Electron), which are related to channeling contrasts, to the inelastic BSE components detected. The distribution of these components varies depending on the accelerating voltage and take-off angle, in that the detection ratio of LLE to inelastic BSE increases with decreasing accelerating voltages and take-off angles. The results obtained in this study can be used for obtaining Z and crystallographic information separately in BSE images for the material of interest.