静圧空気スピンドルの軸回転精度に関する研究 : −スラストカラーの直角度誤差の影響−

概要

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In actual aerostatic spindles, it is said that manufacturing the squareness of a thrust collar within the accuracy of 1 μm is very difficult. Furthermore, it is naturally considered that the squareness error of the thrust collar affects the rotational accuracy of aerostatic spindles. Therefore, in this paper the rotational accuracy of an aerostatic spindle with the squareness error of a thrust collar is numerically investigated. In addition, the effects of the axial bearing stiffness on rotational accuracy of a spindle are discussed by treating two types of aerostatic thrust bearings with different. The spindle locus was obtained by using Non-Linear Orbit Method in which the Reynolds equation and the equation of motion of a spindle were simultaneously solved. It was found that the squareness error of the thrust collar greatly affects both radial and axial displacements of the spindle at speeds.
社団法人精密工学会の論文