弾性ヒンジを用いた動圧形スクイーズ空気軸受

概要

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This paper describes the float characteristics of a new type of squeeze-film gas bearing which can realize noncontact linear-motion guide systems without externally pressurized air. This bearing uses piezoelectric actuators and elastic hinges in order to vibrate a bearing and generate squeeze-film pressures under the bearing. In the theoretical analysis, a simple dynamic model of the proposed bearing structure is presented. The influences of displacement and vibrational frequency of piezoelectric actuators on the float characteristics are investigated theoretically and experimentally. Furthermore, load capacity at vibrational frequency of 2400 Hz and the float characteristics at resonance frequency of a bearing structure are measured. It was consequently found that the proposed bearing can realize a non-contact linear motion guide and the dynamic model presented in this paper can predict well the float characteristics of the proposed bearing.
一般社団法人日本機械学会の論文
1994-06-25