圧電素子を用いた動圧形スクイーズ空気案内面 : リニアガイドへの応用

概要

論文の詳細を見る
This paper describes a floating characteristics of a rectangular squeeze-film gas bearing using a piezoelectric actuator as a vibrator. In this bearing, a counter weight is attached to a piezoelectric actuator to make a bearing vibrate and cause a squeeze-film pressure. The influences of various design parameters on the floating characteristics of the proposed bearing are investigated theoretically and experimentally. Further, a new bearing-guideway system for a linear motion guide is proposed and the floating characteristics of the bearing are also investigated. Consequently it is found that the squeeze-film bearing with 450 mm^2 area for a linear motion guide can carry a counter weight of about 0.4 kg with only the amplitude of 0.5μm of the actuator.
公益社団法人精密工学会の論文
1992-03-05