深溝付多孔質静圧気体スラスト軸受に関する研究(機械要素,潤滑,工作,生産管理など)

概要

論文の詳細を見る
Recently, lithographic technologies using electron beam (EB) or extreme ultra violet (EUV) illumination source have been developed as a next generation advanced lithography. Generally, aerostatic bearings have been used in the lithography machine because they have a very higher accuracy of motion. However, lithography technologies using EB or EUV illumination source have to operate in a high vacuum and require higher precision accuracy than current lithography technology. Therefore, in this paper, an aerostatic porous bearing with deep feed groove is proposed to achieve required accuracy in the next generation lithosgraphy technology. Aerostatic porous bearing have relatively high stiffness and higher damping coefficient than another types of aerostatic bearings. In addition, the proposed bearings can supply pressurized air from a stationary guide-way to a moving table through a deep feed groove without any disturbances of air supply tubes. The static and dynamic characteristics of aerostatic porous beari gs with a deep feed groove are investigated theoretically and experimentally.
一般社団法人日本機械学会の論文
2005-02-25