X線2面入射法による結晶面傾斜角およびX線屈折率の測定

概要

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A new X-ray double incidence method, by which off-angle of crystal surface and the refractive index of the crystal for X-rays are measured exactly, is presented. X-rays which are Bragg-reflected at the first crystal strike both faces of the second crystal, i. e., the surface and the side at the same time. Because of the refractive effect both X-rays propagate in the second crystal in slightly different directions each other. Therefore, the rocking curve which is measured by rotating the second crystal about the axis perpendicular to the incident plane has two peaks. From the angle between two peaks of the rocking curve, off-angle of the surface of the second crystal and the refractive index of the crystal for X-rays are calculated. In order to confirm the exactness of the new method, it is applied to two specimens of GaAs crystal. One is Cr-doped SI- GaAs with the surface offed by 2±0.5°in [01^^-1^^] direction from (100) plane and another is Si-doped n- GaAs with the surface offed by 3±0.5°in [001^^] direction from (100) plane. The measured off-angles of these specimens are 2.211°and 2.987°, respectively. The measured values of refractive index of these specimens are 0.99998493 and 0.99998361. They agree well with the value given by the lorentz dispersion formula, 0.99998492.
琉球大学工学部の論文