S1303-2-2 TiB_2薄膜の硬質化と航空機材料用切削工具への応用([S1303-2]先端材料と加工(2))

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In this work, we attempt to develop the lubricious and hard films based on TiB_<2+α> for cutting of materials for aircrafts. In the experiment, we have prepared the TiB_2 and TiB_<2+α> thin films by DC magnetron sputtering using TiB_2 and TiB_2+10wt.%B target. We controlled the B content to improve the mechanical properties of the TiB_<2+α> films. The films having high hardness more than 30 GPa were able to be obtained under the low base pressure. And the TiB_<2+α> thin films showed the high critical load almost equal to that of TiN films. Moreover, at the optimized coating condition, the TiB_<2+α> films were produced on tungsten carbide cutting tools. And turning tests were carried out against Ti alloys by using the high speed precision lathe.
一般社団法人日本機械学会の論文
2010-09-04