1245 Ti-B-C薄膜の低摩擦化と切削工具への応用検討(J11-2 粒子付着・成膜プロセスと膜の機械的特性(2) 皮膜の機械的特性と成膜プロセス,ジョイントセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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In this work, we attempt to improve the performance of cutting tools against titanium alloy by coating of titanium-boron-carbon (Ti-B-C) thin films. We have prepared the Ti-B-C thin films by DC magnetron sputtering using boron carbide (B_4C) target and Ti target. And we have used silicon plates for the deposition experiments. The target power for Ti was varied from 0 to 200Wand CH_4 gas flow rate from 0 to 80 socm in the deposition process to understand the influences of titanium and carbon contents on nano-indentation hardness, frictional properties and adhesive strength of coatings. As a result, when the target power for Ti was increased, adhesive strength of coatings is risen. And when CH_4 gas flow rate is 40 socm, frictional properties are decreasing.
一般社団法人日本機械学会の論文
2008-08-02