低エネルギーXe原子による炭素スパッタリングの分子動力学シミュレーション (イオン加速グリッド耐久認定用数値解析 JIEDI(JAXA Ion Engine Development Initiatives) ツールの研究開発ワークショップ論文集)

概要

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In order to develop the sputtering database to estimate the erosion of accelerator grids of an ion engine, the low-energy sputtering of carbon material with Xe ion is studied through molecular dynamics (MD) simulations. For the normal incidence, the MD result of sputtering yield almost agrees with the experimental result by Williams et al. (AIAA-2004-3788). However, the experimental result shows less incident angle dependence than the MD result. Because it seems that Xe ions in the experiment feel randomized surface normal vectors when the low-energy Xe ion caused many-body collisions to local surface atoms in rough surface. Thus, it is proper that the MD simulation in a smooth surface overestimates the incident angle dependence of sputtering yield. Hence, it is necessary to include the effect of surface roughness using Monte-Carlo simulation with the sputtering database for plane surface.