605 大気圧マイクロプラズマに対する分光法適用の検討(材料と組織)

概要

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Electron temperature (T_e) and electron density (n_e) are most important parameters of plasma, respectively. However, increasing pressure around plasma, theoretical diagnostic will not fit for actual phenomenon because of electron-heavy particle and heavy particle-heavy particle collision frequencies rising. The UV and visible optical emission spectroscopy (OES) applied for Theoretical diagnostics toward He-plasma in the atmosphere. Relative emission line intensities of neutral helium are estimated for the principal quantum number n=3 to 2 transitions. The population density calculated from compare of the 6 spectrum with defined excitation temperature (T_<ex>) in internal partition function to estimate Te from Tex. The other method is based on Collisional-Radiative model (CRmodel) to calculate Te and ne. Moreover, gained gas temperature (T_g from OH・(306.4[nm]) emission line. In the result, n_e=1×10^9[cm^<-3>], T_e=1.8-2.4[eV] and T_g=400-550[K] on various apparatus conditions.
一般社団法人日本機械学会の論文
2007-09-28