C116 マイクロチャネル内埋め込み薄膜センサによる流体温度計測(第2報)(温度計測)

概要

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Micro-size membrane-type resistance thermometer and thermocouples made of Pt and AI were fabricated by using MEMS process in the present study. The performances were evaluated by measuring the temperature of the fluid in a micro-channel for the purpose of developing a high resolution and low cost temperature sensors for μ-TAS, and to provide fundamental data in developing a database of micro fabrication processes. Several types of sensor pattern were tested in which the spatial resolution and membrane thickness were changed. AI resistance thermometers, which are available to be produced at a lower cost, showed a reasonable performance compared with Pt sensors. The effects of the membrane thickness on the sensor characteristics were examined, and the thickness has its limit value to degrade the sensor reliability.
社団法人日本機械学会の論文
2007-11-23