Mn_3Ir/Co-Fe積層膜のL1_2規則相形成に及ぼすスパッタガス種の影響(薄膜・微粒子・多層膜・人工格子)

概要

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The crystallographic structure of Mn-Ir layers and the exchange anisotropy of Mn-Ir/Co-Fe bilayers were investigated for various process pressures and sputtering gases used in the deposition of the Mn-Ir layers. When Ar was used as the sputtering gas, the unidirectional anisotropy constant J_k was found to decrease with decreasing Ar pressure P_<Ar>. However, in the case of Kr gas, J_k was shown to be constant at about 1.0 erg/cm^2, regardless of the Kr pressure P_<Kr>. In particular, J_k exceeded 1.0 erg/cm^2 for P_<Kr> ≤ 0.1 Pa. The x-ray diffraction profiles showed that superlattice diffractions from the ordered Mn_3Ir phase were detected around the pressures P_<Ar> = 0.2 Pa - 2.0 Pa and P_<Kr> = 0.04 Pa - 2.0 Pa. In the case where P_<Ar> ≤ 0.1 Pa, the damage caused by the recoiled Ar ions is suggested to be the origin of the decreasing J_k and the disappearance of Mn_3Ir phase.
社団法人日本磁気学会の論文
2008-05-01