Mn-Ir/Co-Fe積層膜の構造と磁気特性に及ぼすスパッタガス種の影響

概要

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The crystallographic structure of Mn-Ir layers and the magnetic property of Mn-Ir/Co-Fe bilayers were investigated for Ar pressure, PAr, and Kr pressure, PKr, for the deposition of the Mn-Ir layer. When Ar was used as the sputtering gas, the blocking temperature, TB, was steeply decreased with decreasing PAr, and became TB=220°C at PAr=0.04 Pa. However, in the case of Kr gas, TB was 320°C at PKr=0.04 Pa. The surface roughness, Ra, of bilayers at PAr=0.04 Pa was lowered, comparing to that at PKr=0.04 Pa. The X-ray diffraction profiles showed that the superlattice diffractions from the ordered Mn3Ir phase were detected around the pressures PAr=0.2 Pa-2.0 Pa and PKr=0.04 Pa-2.0 Pa. In PAr≤0.1 Pa, the damage cased by the recoiled Ar ions was suggested as an origin of the decreasing TB and the disappearance of Mn3Ir phase.
日本真空協会の論文
2008-03-20