3点法におけるパラメータ算出法および変位計の設置角度の推定に関する新手法

概要

論文の詳細を見る
Three-point method is an error separation method for roundness and spindle error measurement. However, there are still some problems for practical use of three-point method. The discrepancy of the measurement sensitivity between three displacement sensors affects the measured result in the specific spatial frequency range. In three-point method, in-situ calibration of displacement sensors are difficult for some sensor angles. So, this paper reports new algorithm to correct measurement sensitivity of displacement sensors and demonstrates the feasibility of the algorithm through numerical simulations and experiments. The algorithm realizes precise roundness and spindle error measurement. This result show that the algorithm correct the difference of the measurement sensitivity to less than 2%. And the algorithm applied to measurement of sensor angles also.
公益社団法人精密工学会の論文
2008-06-05