レーザ干渉測長機を用いたNC工作機械の円運動測定装置の開発 : 測定原理,装置の構成ならびに2,3の実験結果(機械要素,滑潤,工作,生産管理など)

概要

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Circularity tests method using laser displacement interferometer has been developed. The new measuring method features a much longer range of motion than ordinal circular tests method such as DBB method, with relative displacements measured by laser interferometer. Therefore minimum and maximum radius of a circular test path is under less restriction than a ball link system. Moreover, the measuring system can also be applied for evaluation of positioning accuracy in X or Y axis, and in XY plane. The proposed device consists of a laser interferometer whose interferometer head and retroreflector holder are connected with stainless steel rod. The stainless steel rod has a synthetic resin linear bearing, thus retroreflector holder is movable against interferometer and both optical components are always facing. The laser interferometer measures distance change between interferometer and retroreflector. At first, the measuring accuracy of the apparatus was measured, and the results were compared with capacitive sensor. Then, the apparatus was applied for circularity tests and positioning error measurements for a vertical machining center. The results obtained show the validity of the apparatus.
社団法人日本機械学会の論文
2002-03-25