マイクロ部品の形状・寸法測定に関する研究 : 装置の改良ならびにプローブの校正と寸法測定結果(機械要素,潤滑,工作,生産管理など)

概要

論文の詳細を見る
In order to facilitate the advancement of micro machine technology and to encourage its use across a wider range of industrial fields, measuring technology appears to be essential. For the development of micromachines and microfabrication technologies, it is necessary to devise a technique to measure both profile and dimension of micro-components. Some researches on measuring methods for micro-boreholes in the micrometer range have been reported. However, general-purpose CMM for both form and dimensional metrology on micro-system components has not been realized yet. To this end, one of the authors tried to develop a small three dimensional form measuring apparatus which has non-contact probe detecting proximity to measuring object through tunneling effect, and the results has already been reported. In this paper, measurement not only form but also dimension of micro-components are tried. Modified device and the calibration technique for micro-probes are explained in detail, and then several measuring results are shown.
一般社団法人日本機械学会の論文
2002-09-25