マイクロスピンドル用光学式回転精度測定装置の開発 : 測定基準として球を用いる場合の光学系の基本特性に関する考察

概要

論文の詳細を見る
One of the authors has developed an optical measuring device for rotation accuracy of machine tool spindles, which can sense the movement of reflected light from a concave mirror attached to the spindle end. However it is difficult to obtain small and accurate concave mirrors and to set them to the spindle axis. Therefore we have newly proposed a measurement method for spindle rotation accuracy using a small steel ball or ball lens as a reference. Because a small reference sphere can be used, the proposed measurement system is also appropriate for the evaluation of a high speed miniaturized spindles. This paper refers to the principle of the measuring method and the consideration for basic characteristics of an optical system with simulations, and then the experimental results demonstrate the validity of the measurement method.
公益社団法人精密工学会の論文
2006-09-05