Rapid Plasma Nitriding Process by Means of Hollow Cathode Glow Discharge(Materials, Metallurgy & Weldability)

概要

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The probability of rapid nitriding process assisted by hollow cathode glow discharge was examined mainly for austenitic stainless steel SUS 304. Hollow cathode glow discharge was easily realized by arranging some specimens on a cathode plate so that the distance between each specimen coincided with an optimum value, which was different depending on gas pressure as 3mm for 800 and 1330Pa, 5mm for 270Pa and 15mm for 80Pa at N_2+H_2 mixed gas. At these conditions, nitriding speed was increased to about 2 times as fast as that with a conventional plasma nitriding process even at the same nitriding temperature and time without any decrease in hardness of nitrided layer. This increase in nirriding speed was considered to be due to the high ionization rate of hollow cathode glow discharge in comparison with ordinary glow discharge.
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