Characterization of the Refractive Index of Lateral-Oxidation-Formed Al_xO_y by Spectroscopic Ellipsometry
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概要
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We have used spectroscopic ellipsometry (SE) to characterize the refractive index of Al_xO_y formed by lateral oxidation. Details of the wavelength dispersion of the index for Al_xO_y were clarified for the first time. The refractive index estimates ranged from 1.53 to 1.63 in the range of wavelengths from 1600 to 400 nm. These values are much lower than those for GaAs and AlAs. Moreover, SE made it possible to observe the thickness change of each layer before and after oxidation. These results show that we can optimize the device structure of vertical-cavity surface-emitting lasers in which Al_xO_y is present as a current-confinement layer or to provide distributed Bragg reflectors. This will lead to further improvements in the lasing characteristics of this type of laser.
- 2002-05-15
著者
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Kondow Masahiko
Rwcp Optical Interconnection Hitachi Laboratory C-o Central Research Laboratory Hitachi Ltd.
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Kitatani Takeshi
Rwcp Optical Interconnection Hitachi Laboratory C-o Central Research Laboratory Hitachi Ltd.
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