Amorphous-Si Transmission Gratings Prepared by Ga^+-Focused-Ion-Beam Milling and Their Polarization Characteristics : Instrumentation, Measurement, and Fabrication Technology

Department of Electronic Materials Eng., Kwangwoon University

Department of Electronic Materials Eng., Kwangwoon University

Department of Endocrinology and Metabolism, Kyung Hee University School of Medicine

Department Of Electronic Materials Engineering Kwangwoon Universsity

National Central Univ. Chung‐li Twn

Postech Kyungbuk Kor

Department Of Electronic Materials Engineering Kwangwoon University

Department Of Electronic Materials Engineering Kwangwoon University

Institute For Materials Research Tohoku University

National Rsearch Laboratory Of 3d Media School Of Eletronic Engineering Kwangwoon University

National Research Laboratory Of 3d Media School Of Electronic Eng. Kwangwoon University

Department Of Electronic Materials Eng. Kwangwoon University

Institute for Materials Research, Tohoku University

Department of Biotechnology, College of Engineering, Daegu University, Gyeongbuk 712-714, Republic of Korea