Electrical Characteristics of Ge25Se75 Thin Films by Ag Ion Doping Methods for Resistance Random Access Memory Applications

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概要

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• Chalcogenide thin films have characteristics of both electric switching and individual optical reactivity. The resistance random access memory (ReRAM) using amorphous chalcogenide materials is based on the electrochemical control of photodiffused metal ions in chalcogenide thin films. In this study we focus on the formation of a straight filament pattern in Ge25Se75 thin films by changing the doping method for Ag ions. Ag photodissolution was performed by the general method (UV exposure) and a holographic lithography method [using He--Ne laser (632.8 nm)]. We measured the electrical characteristics of each device. Improved results were obtained with the induced straight filament pattern device. In the device patterned straightly, operation voltage and reliability were improved.

• 2012-09-25

著者

• NAM Ki-Hyun

  Department of Electronic Materials Engineering, Kwangwoon University

• Chung Hong-bay

  Department Of Electronic Materials Eng. Kwangwoon University

• Kim Jang-Han

  Department of Electronic Materials Engineering, Kwangwoon University, Seoul 139-701, Korea

• Chung Hong-Bay

  Department of Electronic Materials Engineering, Kwangwoon University, Seoul 139-701, Korea

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• Sub-0.1 μm Patterning Characteristics of Inorganic Thin Films by Focused-Ion-Beam Lithography
• Amorphous-Si Transmission Gratings Prepared by Ga^+-Focused-Ion-Beam Milling and Their Polarization Characteristics : Instrumentation, Measurement, and Fabrication Technology
• Thermally and Optically Induced Nanocrystallites in Amorphous ZnSe Thin Films
• Electrical Switching Studies of Amorphous Ge1Se1Te2 Thin Film for a High-Performance Nonvolatile Phase-Change Memory
• Electrical Erasing of Holographic Grating in Amorphous Chalcogenide Thin Films
• Electrical Characteristics of Ge25Se75 Thin Films by Ag Ion Doping Methods for Resistance Random Access Memory Applications
• Polarization Dependence of Holographic Grating in Chalcogenide Film
• Polarization Dependence of Photoinduced Birefringence in Chalcogenide Thin Film
• Thermally and Optically Induced Nanocrystallites in Amorphous ZnSe Thin Films

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