Amorphous Se_<75>Ge_<25> Resist Profile Simulation of Focused-Ion-Beam Lithography

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-04-15

著者

• Chung H‐b

  Kwangwoon Univ. Seoul Kor

• CHUNG Hong-Bay

  Department of Electronic Materials Eng., Kwangwoon University

• Lee H‐y

  National Central Univ. Chung‐li Twn

• LEE Hyun-Yong

  Department of Electronic Materials Engineering, Institute of New Technology, Kwangwoon University

• Lee Hyun-yong

  Department Of Electronic Materials Engineering And Institute Of New Technology Kwangwoon University

• Chung Hong-bay

  Department Of Electronic Materials Eng. Kwangwoon University

関連論文

• Electrical Erasing of Holographic Grating in Amorphous Chalcogenide Thin Films
• Amorphous Se_Ge_ Resist Profile Simulation of Focused-Ion-Beam Lithography
• Heat Treatment of Boron-Doped CdS Films Prepared by Chemical Bath Deposition for Solar Cell Applications
• Optical Properties of Copper in Chalcogenide Materials Used in Programmable Metallization Cell Devices
• Optical properties of copper in chalcogenide materials used in programmable metallization cell devices (Electron devices: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
• Optical properties of copper in chalcogenide materials used in programmable metallization cell devices (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
• Polarization Dependence of Holographic Grating in Chalcogenide Film
• Sub-0.1 μm Patterning Characteristics of Inorganic Thin Films by Focused-Ion-Beam Lithography
• Amorphous-Si Transmission Gratings Prepared by Ga^+-Focused-Ion-Beam Milling and Their Polarization Characteristics : Instrumentation, Measurement, and Fabrication Technology
• Polarization Dependence of Photoinduced Birefringence in Chalcogenide Thin Film
• A Photorefractive Setup for Parallel Not-OR and Not-AND Operations with Mutually Incoherent Light
• Real-time Incoherent Optical Pattern Recognition with Photorefractive Crystals
• Photorefractive Optical Exclusive OR Logic Operation and Optical Images Subtraction with Incoherent Input Channels
• Thermally and Optically Induced Nanocrystallites in Amorphous ZnSe Thin Films
• Growih and Performance Study of Aluminum-Free InGaAs/GaAs/InGaAsP Strained Quantum-Well Pump Lasers : Optics and Quantum Electronics
• Electrical Switching Studies of Amorphous Ge1Se1Te2 Thin Film for a High-Performance Nonvolatile Phase-Change Memory
• Electrical Erasing of Holographic Grating in Amorphous Chalcogenide Thin Films
• Electrical Characteristics of Ge25Se75 Thin Films by Ag Ion Doping Methods for Resistance Random Access Memory Applications
• Polarization Dependence of Holographic Grating in Chalcogenide Film
• Polarization Dependence of Photoinduced Birefringence in Chalcogenide Thin Film
• Thermally and Optically Induced Nanocrystallites in Amorphous ZnSe Thin Films

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