テラヘルツ波を用いたフレキシブルパッケージに生じる微小欠陥の実時間検出(機械力学,計測,自動制御)

概要

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A method to detect production faults in flexible plastic packages using terahertz(THz) radiation is presented. Relying on the large difference between the absorption coefficients of plastic and water(for water-filled channel defects), and on the refraction index difference between plastic and air(for air-filled channel defects) our technique consists of focusing and scanning a THz beam on the sealed area of the package, followed by the detection of the transmitted signal. We tested our THz system on defects simulated by water-filled and air-filled round channels imbedded in polyethylene films, with diameters ranging 10 to 100 pun. The detection limit(the minimum size of a detectable defect) depends on the conveying speed ; this relationship is determined and analyzed. The results show that our THz system has the potential of being applied in an actual production line for real-time inspection.
社団法人日本機械学会の論文
2005-06-25