前駆体ポリカルボシランをマイクロポーラス炭化ケイ素系膜に変換する際の構造変化(<ゲストエディターによる特集>有機-無機変換プロセス)

概要

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Silicon carbide-based microporous ceramic membranes for hydrogen separation were prepared via pyrolysis of polycarbosilane as a polymeric precursor. To prepare membranes with excellent hydrogen separation performance, effects of hydrosililation cross linking, addition of thermally-labile polymer as well as pyrolysis conditions on the structural evolution during conversion of the polycarbosilane precursor into the silicon carbidebased microporous membranes, have been investigated. The results of the activation energy for possible reactions, change in functional groups, and nitrogen adsorption and gas permeance measurements suggested that the cross-linking reaction between triple bond and Si-H bond gave three dimensional networks, resulting in smaller micropore and larger surface area. The size of the gases evolved during pyrolysis was also suggested to have relationship with the micropore structure.
2006-06-01