シュリンクフィッタを用いた高精度光学系によるレーザ微細加工装置の開発

概要

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In order to realize fine processing with a high precision optical system, we have developed a laser processing system with galvanometer scanners and optical lenses using a shrink fitter. The shrink fitter prevents the misalignment of the lenses at the elevated temperature. Therefore fine laser spots can be obtained over the quite wider scanning width, even at elevated temperatures. We examined the possibility of application to laser processing of this lens system using the shrink fitter. Diameters of the lenses used in this study were 160mm so that the laser spots could be scanned over the width of 100mm, in both directions of the X-axis and Y-axis. There was large distortion of the laser beam which was inherent to each lenses and can not be removed by mechanical adjustment So we introduced the formula to correct the beam path using the least square method. Finally, we developed the fine laser processing system using shrink fitter.
社団法人精密工学会の論文
2006-03-05