シュリンクフィッタを用いたレンズの超精密接合法の光学シミュレーションによる理論的検討

概要

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The fθ lens unit used in this simulation was consisted of four spherical lenses which were fixed into a housing by a shrink fitter. The shrink fitter is a cylinder-shaped machine element which is made of plastic material. The fθ lens unit with the shrink fitter could converge the laser beam over a wide scanning width of 80mm. However the lager interference of shrinkage fit caused the lens deformations, much greater than the conventional limitation of surface irregularity of λ/2. These lens deformations will deteriorate the laser beam spots. In addition to the effect of the interference, the beam spots will be very sensitive to lens decenters and the lens tilts. Thus we theoretically examined the effects of the lens deformations and the lens alignment on the laser beam spots of the fθ lens unit fixed by the shrink fitter. The limitation of the interferences and the lens misalignment were discussed.
公益社団法人精密工学会の論文
2005-06-05