224 広領域レーザ微細加工装置の研究(超精密・マイクロ加工)

概要

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We have developed a fine laser processing equipment with high accuracy positioning over the wide processing area. Galvanometer scanners and scanning lens made it possible to move the laser spots faster than mechanical stages did. So far this equipment had a somewhat large field curvature which adversely affected positioning accuracy over the wide scanning area. So we examined an influence of the beam expander lens on the field curvature by both optical analysis and experiments. In the experiment, stainless plates of 1mm in thickness were processed with this laser processing equipment across the wide processing area of 100mm by 100mm. The sizes of the process marks on the stainless plates were measured to evaluate the process performance of this equipment. As a result the sizes of the process marks were kept constant such as 30μm in diameter and 6μm in depth despite of the wide processing area.
社団法人日本機械学会の論文
2006-11-25