シュリンクフィッタを用いたポリゴンミラーの超精密接合 : 回転時のミラー反射面の平面度のための最適形状

概要

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In a previous paper, we have developed a ultra precision method of joining an alumimum polygon mirror and a Sic self-acting air bearing using a shrink fitter. However, after the joining, the mirror surfaces need to be refinished by an ultra precision lathe to the fiattness of under 100nm, because the fiattness of the mirror surfaces will deteriorate beyond the allowable level. In this paper, we tryed to maintain the allowable fiattness of the mirror surfaces even after the joining by changing the shape of the polygon mirror. Optimum shapes were theoretically seeked by 2-dimensional FEM analysis through trial and error. After some 23 shapes were examind, we succeeded in finding the optimum shape that maintain the fiattness below 146 nm at a rotational speed of 30,000 rpm. The optimum shape obtained by the 2D-FEM analysis was examind by the 3D FEM analysis.
一般社団法人日本機械学会の論文
1998-12-25