シュリンクフィッタ技術を用いた広領域レーザ微細加工装置の開発(機械要素,潤滑,工作,生産管理など)

概要

論文の詳細を見る
Generally laser processing machines use mechanical stages or robot arms to positioning a laser beam. Such positioning systems have wide process area and great positioning accuracy. However its process speed is very slow. We have developed a fine laser processing equipment with high accuracy positioning as well as wide process area. Galvanometer scanners and fθ lens of large diameter using a shrink fitter made it possible to process with great accuracy across the wide area. In this paper, we examined the process accuracy of this equipment by measuring the marks processed by this equipment. And in order to examine the process quality across the wide process area, the surface of the process marks were measured with a stylus profilometer. In addition, we considered an influence of a decentering of each lens in the scanning lens unit on positioning accuracy of the laser spots and field curvature on an image plane.
社団法人日本機械学会の論文
2007-10-25