Heat-Resistant Polyarylates for Waveguide-Type Device Application
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概要
- 論文の詳細を見る
Polyarylates (PARs) with high glass transition temperature (T_g) of over 200℃ are newly synthesized and used for waveguide-type device application. Thermal and optical properties of PARs are investigated, and results indicate that PARs show high thermal stability as well as high optical transparency in the visible region. High-resolution relief gratings on PAR thin films are fabricated by a direct electron-beam (EB) writing technique together with thermal development. Using a reactive-ion-etching (RIE) technique, the waveguide channel ridge was fabricated.
- 社団法人応用物理学会の論文
- 2000-11-15
著者
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Tomiki M
Shizuoka Univ. Hamamatsu Jpn
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Tomiki Masahiro
Faculty Of Engineering Shizuka University
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Sugihara Okihiro
Institute Of Multidisciplinary Research For Advanced Materials (imram) Tohoku University
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Sugihara Okihiro
Tohoku Univ. Institute Of Multidisciplinary Research For Advanced Materials
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Sugihara Okihiro
Faculty Of Engineering Shizuoka University
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Sugihara Okihiro
The Graduate School Of Electronics And Technology Shizuoka University
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OKAMOTO Naomichi
Faculty of Engineering, Shizuoka University
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TSUCHIMORI Masaaki
Toyota Central Research and Development Laboratories, Inc.
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FUJIMURA Hisashi
Faculty of Engineering, Shizuoka University
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EGAMI Chikara
Faculty of Engineering, Shizuoka University
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Fujimura Hiroki
Faculty Of Engineering. Shizuoka University
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Egami Chikara
Faculty Of Engineering Shizuoka University
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Tsuchimori M
Toyota Central Research And Development Laboratories Inc.
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AKIZUKI Takamasa
Research and Development Center, Unitika Ltd.
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SHIRAI Hiromasa
Research and Development Center, Unitika Ltd.
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Okamoto N
Shizuoka Univ. Hamamatsu Jpn
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Okamoto Naomichi
Faculty Of Engineering Shizuoka University
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Akizuki Takamasa
Research And Development Center Unitika Ltd.
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Shirai Hiromasa
Research And Development Center Unitika Ltd.
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