Theoretical Calculation of Mask Error Enhancement Factor for Periodic Pattern Imaging
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-12-30
著者
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TERASAWA Tsuneo
Central Research Laboratory, Hitachi, Ltd.
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Hasegawa Norio
Device Development Center Hitachi Ltd.
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Terasawa Tsuneo
Central Research Laboratory Hitachi Ltd.
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