Effects of N_2 Addition on Aluminum Alloy Etching in Inductively Coupled Plasma Source
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-10-15
著者
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Lee Won
System Ic R&d Center Hynix Semiconductor Inc.
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Lee Won
System Ic R & D Center Hyundai Electronics Industries Co. Ltd.
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Kim K
Hynix Semiconductor Inc. Chungchongbuk-do Kor
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Kim K
Hynix Semiconductor Inc. Chungchongbuk‐do Kor
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Kim Kil
System IC R & D Center, Hyundai Electronics Industries Co., Ltd.
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Baek Kye
System IC R & D Center, Hyundai Electronics Industries Co., Ltd.
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Shin Kang
System IC R & D Center, Hyundai Electronics Industries Co., Ltd.
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Park Chagwook
System IC R & D Center, Hyundai Electronics Industries Co., Ltd.
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KOHAMA Keiichi
Institute for Molecular Science
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Beak Kye
System Ic R&d Center Hynix Semiconductor Inc.
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Shin K
System Ic R&d Center Hynix Semiconductor Inc.
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Park Chagwook
System Ic R & D Center Hyundai Electronics Industries Co. Ltd.
関連論文
- Effects of N_2 Addition on Aluminum Alloy Etching in Inductively Coupled Plasma Source
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