Effects of Gas Species on Charging Induced Tungsten Plug Corrosion during Post Metal Etch Process
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-02-15
著者
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Kim K
Hynix Semiconductor Inc. Chungchongbuk-do Kor
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LEE Dong-Ju
Center for Information Storage Device, Yonsei University
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Kim K
Hynix Semiconductor Inc. Chungchongbuk‐do Kor
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Lee Dong
Center For Information Storage Device Yonsei University
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Kim Kil
System IC R & D Center, Hyundai Electronics Industries Co., Ltd.
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Baek Kye
System IC R & D Center, Hyundai Electronics Industries Co., Ltd.
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Shin Kang
System IC R & D Center, Hyundai Electronics Industries Co., Ltd.
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KOHAMA Keiichi
Institute for Molecular Science
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Lee Dal
Center For Information Storage Device Yonsei University
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Lee D
System Ic R&d Center Hynix Semiconductor Inc.
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Beak Kye
System Ic R&d Center Hynix Semiconductor Inc.
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Hwang C
System Ic R&d Center Hynix Semiconductor Inc.
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Shin K
System Ic R&d Center Hynix Semiconductor Inc.
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Kim Jong
System Ic R & D Center Hynix Semiconductor Inc.
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LEE Dal
System IC R&D Center, Hynix Semiconductor Inc.
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HWANG Chung
System IC R&D Center, Hynix Semiconductor Inc.
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LEE Dae
System IC R&D Center, Hynix Semiconductor Inc.
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Kim J
System Ic R&d Center Hynix Semiconductor Inc.
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Hwang Chung
System Ic R & D Center Hynix Semiconductor Inc.
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LEE Dae
System IC R&D Center, Hynix Semiconductor Inc.
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LEE Dal
System IC R&D Center, Hynix Semiconductor Inc.
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