10 GHz Surface Acoustic Wave Filters with Narrow-Gap Interdigital Transducer Structure
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概要
- 論文の詳細を見る
Controllable well-insulated gaps between electrodes can be obtained by anodic oxidation of the edges of the regions of an Al film covered by photo resist. This technique is used to fabricate surface acoustic wave narrow gap interdigital transducers (NG-IDTs) and narrow gap floating electrode type unidirectional transducers (NG-FEUDTs). Experimental results indicate that the SAW NG-IDTs and NG-FEUDTs operate in the 10GHz range and have an electrode width of less than 0.2 μm.
- 社団法人応用物理学会の論文
- 1996-05-30
著者
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Yamanouchi Kazuhiko
Research Institute Of Electrical Communication Tohoku University
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WAGATSUMA Yasuo
Research Institute of Electrical Communication, Tohoku University
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Wagatsuma Yasuo
Research Institute Of Electrical Communication Tohoku University
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Aoki Kazuo
Research Institute Of Electrical Communication Tohoku University
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TSUJI Takatoshi
Research Institute of Electrical Communication, Tohoku University
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Tsuji Takatoshi
Research Institute Of Electrical Communication Tohoku University
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