GHz-Range Conventional λ/4 Unidirectional Surface Acoustic Wave Transducers and Their Application to Low-Loss and Zero-Temperature Coefficient Filters

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概要

• 論文の詳細を見る

• A new fabrication technology using an oblique angled photo-lithography process for a conventional λ/4 type single phase unidirectional transducer (SPUDT) having a thin dielectric layer with a λ/8 shift from the electrode is proposed. This process does not require a precise alignment. This technique is also applied to a SiO_2/LiNbO_3 substrate with zero temperature coefficients. Experimental results using a conventional λ/4 type SPUDT filter show low-loss characteristics. A 2.2 dB insertion loss over 1 GHz-range is achieved in a simulation using an experimentally measured S parameter, assuming that ideal matching circuits are added in the electrical ports. The results also show the characteristics of low-loss filters with small temperature coefficients of 2.5 ppm/℃ at 1 GHz.

• 社団法人応用物理学会の論文
• 1997-05-30

著者

• ODAGAWA Hiroyuki

  Research Institute of Electrical Communication, Tohoku University

• YAMANOUCHI Kazuhiko

  Research Institute of Electrical Communication, Tohoku University

• Meguro Toshiyasu

  Research Institute Of Electrical Communication Tohoku University

• Meguro T

  Research Institute Of Electrical Communication Tohoku University

• Kojima Toshiyuki

  Research Institute Of Electrical Communication Tohoku University

• Yamanouchi Kazuhiko

  Research Institute Of Electrical Communication Tohoku University

• WAGATSUMA Yasuo

  Research Institute of Electrical Communication, Tohoku University

• Wagatsuma Y

  Research Institute Of Electrical Communication Tohoku University

• Wagatsuma Yasuo

  Research Institute Of Electrical Communication Tohoku University

• Odagawa Hiroyuki

  Research Institute Of Electrical Communication Tohoko University

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