Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF・TrFE)] Films by High Frequency C-V Measurements of Al-SiO_2-P(VDF・TrFE)-SiO_2-Si Capacitors
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概要
- 論文の詳細を見る
MIS capacitors with Al-SiO_2-P(VDF・TrFE)-SiO_2-Si structure were fabricated depositing P(VDF・TrFE) film by a spin coating method to investigate properties of very thin ferroelectric polymer films. By sandwiching the polymer film with SiO_2 films, application of an electrical field high enough for ferroelectricity measurement in several tens nm thick P(VDF・TrFE) films became possible. It is revealed that P(VDF・TrFE) film as thin as 32nm shows ferroelectricity by high frequency C-V measurements of the capacitors.
- 社団法人応用物理学会の論文
- 1984-09-20
著者
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Kato Kinya
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Kato Kinya
Ntt Interdisciplinary Research Laboratories
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Kato Kinya
Musashino Electrical Communication Laboratory
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YAMAUCHI Noriyoshi
Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
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Wada Tsutomu
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Yamauchi Noriyoshi
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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- Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF・TrFE)] Films by High Frequency C-V Measurements of Al-SiO_2-P(VDF・TrFE)-SiO_2-Si Capacitors