Hillock-Free Aluminum-Based Alloy Interconnections for Active-Matrix Liquid-Crystal Displays
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概要
- 論文の詳細を見る
A method is proposed for forming hillock-free aluminum-based alloy bus lines for active-matrix liquid-crystal displays (LCDs). Aluminum (Al)-based alloy films are deposited using an Al target containing boron (B) or nickel (Ni) in a sputtering ambient containing nitrogen. The Al-Ni films deposited using an Al target containing Ni showed excellent hillock resistance: virtually no hillock formation after thermal treatment at around 400℃ and no significant increase in resistivity. These films also showed good patternability with a simple wet etching: a smooth line edge and a gently tapered profile. These films are thus suitable for the bus lines of active matrices.
- 社団法人電子情報通信学会の論文
- 1997-02-25
著者
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Kato Kinya
Ntt Interdisciplinary Research Laboratories
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Kato K
Ntt Integrated Information Amp Energy Systems Laboratories
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Kato Kinya
Ntt Integrated Information Amp Energy Systems Laboratories
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WADA Tsutomu
NTT Integrated Information amp Energy Systems Laboratories
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KAKUDA Nobuhiko
NTT Integrated Information amp Energy Systems Laboratories
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KAWADA Tadamichi
NTT Integrated Information amp Energy Systems Laboratories
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Kawada Tadamichi
Ntt Integrated Information Amp Energy Systems Laboratories:applied Komatsu Technology Inc.
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Wada Tsutomu
Ntt Integrated Information Amp Energy Systems Laboratories:taikisha Co. Ltd.
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Kakuda Nobuhiko
Ntt Integrated Information Amp Energy Systems Laboratories:ntt Advance Technology Co.
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