Additional Bias Effects on the Formation of Amorphous Hydrogenated Carbon Films by ECR

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-07-20

著者

• INOUE TOHRU

  Department of Pathology, Tokyo Kosei Nenkin Hospital

• MARUYAMA Kazunori

  Department of Agricultural Chemistry, Faculty of Agriculture, The University of Tokyo

• KAMATA Kiichiro

  Department of Chemistry, Nagaoka University of Technology

• Kamata K

  Tdk Corp. Chiba

• Kamata Kiichiro

  Department Of Chemistry Nagaoka University Of Technolgy

• TANABE Isao

  Department of Chemistry, Nagaoka University of Technology

• Tanabe Isao

  Department Of Chemistry Nagaoka University Of Technology

• Maruyama Kazunori

  Department Of Agricultural Chemistry Faculty Of Agriculture The University Of Tokyo

• Maruyama Kazunori

  Department Of Chemistry Nagaoka University Of Technology

• Inoue Tohru

  Department Of Chemistry Faculty Of Science Fukuoka University

• Inoue Tohru

  Department Of Chemistry Nagaoka University Of Technology

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