Mechanical properties of 3Y-ZrO_2 and 8Y-ZrO_2 films by rf sputtering

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概要

• 論文の詳細を見る

• Authors prepared 8mol%Y_2O_3-ZrO_2 (8Y-ZrO_2) and 3mol%Y_2O_3-ZrO_2 (3Y-ZrO_2) ceramic films by the magnetron-assisted rf sputtering method on the glass substrate. The prperties of hardness, the internal stress and the refractive index etc. were investigated for the prepared films. The hardnesses of 8Y-ZrO_2 and 3Y-ZrO_2 films were 15.6 GPa and 12.9 GPa, respectively. The total compressive stresses for 8Y-ZrO_2 and 3Y-ZrO_2 films at 1μm thick on the borosilicate glass substrates were 1280 Nm^-1 and 1100 Nm^-1, and the internal stresses for both films at 0.1μm thick were 3.13 GPa and 2.94 GPa, respectively. The fracture toughnesses for the coated substrate with 8Y-ZrO_2 and 3Y-ZrO_2 films were 0.719 MNm^-3/2 and 1.11 MNm^-3/2, respectively.

• 長野工業高等専門学校の論文
• 1996-12-27

著者

• Kamata K

  Tdk Corp. Chiba

関連論文

• Additional Bias Effects on the Formation of Amorphous Hydrogenated Carbon Films by ECR
• Mechanical properties of 3Y-ZrO_2 and 8Y-ZrO_2 films by rf sputtering

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