Vapor Growth Characteristics of ZnTe in the Horizontal Open-Tube System and Its Thermodynamic Analysis
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概要
- 論文の詳細を見る
The growth and source-depletion characteristics of ZnTe were investigated by the horizontal open-tube method using H_2 carrier gas. The system consists of vapor-etching, supersaturation gas (preferential growth), nucleation and reactor-wall deposition regions from the source-zone downstream. The preferential growth region widens owing to the decrease in the nucleation temperature along with the decrease in the temperature gradient near the source-zone or the flow rate. This region gives smooth, flat epi-layers and can be described by a quasi-equilibrium model. On the other hand, the reactor-wall deposition characteristics can be expressed by a complete equilibrium model if a substrate is set at a position far enough from the critical-nucleation position. Thermodynamic analysis of the laminar and diffusion flows gives good agreement with the experimental results.
- 社団法人応用物理学会の論文
- 1983-08-20
著者
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Ogawa Hiroshi
Department Of Anatomy And Neurobiology Kyoto Prefectural University Of Medicine
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Nishio Mitsuhiro
Department Of Electrical And Electronic Engineering Faculty Of Science And Engineering Saga Universi
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Nakamura Yoshihiro
Department Of Computer Science And Media Engineering Faculty Of Engineering Yamanashi University
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NISHIO Mitsuhiro
Department of Electrical Engineering, Faculty of Science and Engineering, Saga University
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OGAWA Hiroshi
Department of Electrical Engineering, Faculty of Science and Engineering, Saga University
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