Solid-Phase Epitaxy of CVD Amorphous Si Film on Crystalline Si
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1982-10-20
著者
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Tabe Michiharu
Electrical Communication Laboratories
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KUNII Yasuo
Electrical Communication Laboratories, Nippon Telegraph and Telephone Corporation
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KAJIYAMA Kenji
Electrical Communication Laboratories
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Kunii Yasuo
Electrical Communication Laboratories
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