Low-Pressure Measurement Using an Ultrasonic Sensor II
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Pressure dependence of ultrasonic signals transmitted through an area evacuated over the range of 13 Pa to atmospheric pressure was found to show a linear relationship in a log-log plot, in which a bend appears at around 10^3-10^4 Pa. The cause of the bend was not clear. A treatment including the absorption of ultrasonic waves into the medium in the evacuated area was applied to the analysis. A least squares fitting of the equation obtained to the experimental results showed good agreement, and the absorption coefficient obtained from the fitting parameters gave a reasonable value.
- 社団法人応用物理学会の論文
- 1999-09-15
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- Low-Pressure Measurement Using an Ultrasonic Sensor II