Potential Profiles in an Electron-Beam-Excited Plasma (<Special Issue> Plasma Processing)
スポンサーリンク
概要
- 論文の詳細を見る
Potential profiles are measured in an electron-beam-excited plasma (EBEP) system with the high-current lowenergy electron beam. It is found that there is a potential step around the anode. The space potential at the center of the plasma is more negative than that at the edge plasma by the space charge of beam electrons. It is shown that the potential dip of the radial profile changes into a hill by increasing the beam energy. The radial profile becomes flat with increase of gas pressure.
- 社団法人応用物理学会の論文
- 1994-07-30
著者
-
Hara T
Yamaguchi Univ. Ube Jpn
-
Hara Tamio
The Institute Of Physical And Chemical Research
-
HAMAGAKI Manabu
The Institute of Physical and Chemical Research (RIKEN)
-
Hamagaki Manabu
The Institute Of Physical And Chemical Research
関連論文
- Trap States of Tris-8-(Hydroxyquinoline)Aluminum Degraded by Blue Laser Using Thermally Stimulated Current Method
- Effect of Oxygen Plasma Treatment of Indium Tin Oxide for Organic Light-Emitting Devices with Iodogallium Phthalocyanine Layer
- Cleaning of Glass Disk in Oxygen Plasma by Using Compact Electron-Beam-Excited Plasma Source
- Enhancement of Soft X-Ray Emission from Al Plasma by Pulse Train Laser Irradiation
- Observation of Soft X-Ray Amplified Spontaneous Emission in a Recombining Si Plasma Pumped by a Low-Power Laser
- Soft X-Ray Lasing in an Al Plasma Produced by a 6 J Laser
- A Transverse Electron Beam Source for the Excitation of CW Lasers
- Deposition of Diamond-Like Carbon Using Compact Electron-Beam-Excited Plasma Source
- Investigation of Nitrogen Atoms in Low-Pressure Nitrogen Plasmas Using a Compact Electron-Beam-Excited Plasma Source
- CW Ar^+ Laser Pumped by an Intense Electron Beam
- Quasi-Steady Population Inversions of He^+ in a Freely Expanding Plasma
- Quasi-Steady Laser Oscillation in the Recombining Hydrogen Plasma
- Observation of Population Inversions in a Freely Expanding Pure Hydrogen Plasma
- Potential Profiles in an Electron-Beam-Excited Plasma ( Plasma Processing)
- Control of Floating Potential in an Electron-Beam-Excited Plasma
- Frequency Dependence of the RF Electric Field Effect on He-Ne Laser Output
- Density Measurement of an MPD Arcjet by a CO_2 Laser Interferometer
- High Degree of Dissociation of Nitrogen Molecules in Large-Volume Electron-Beam-Excited Plasma
- Trap States of Tris-8-(Hydroxyquinoline)Aluminum Degraded by Blue Laser Using Thermally Stimulated Current Method
- Soft X-ray lasing in Al plasma produced by a low power laser.