Very Long and Large-Area RF Plasma Productions by Odd Surface Waves for Online Mass Production of Amorphous Silicon Solar Cells or Mirrors (<Special Issue> Plasma Processing)
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概要
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Very long and large-area plasmas are confirmed to be produced by means of RF discharge between a pair of very long or large-area electrodes. The electrodes are separated from plasma by dielectric layers. The length of long plasma is 11 m in the case of using a long cylindrical dielectric tube with 28 mmφ. The area and thickness of largearea plasma are 73 cm×176 cm and 2.5 cm, respectively, in the case of using a large-area rectangular dielectric tube. The plasmas are thought to be produced via interaction between two electromagnetic waves, odd metal surface wave (MSW_o) and odd plasma surface wave (PSW_o), propagating between electrodes.
- 社団法人応用物理学会の論文
- 1994-07-30
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