Mode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions
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概要
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In order to determine electromagnetic (EM) eigenmodes for radio-frequency (RF)plasma productions between a pair of large-area electrodes, nornaal EM modes pro-pagating in a region between a pXarnar waveguide with one plasma and two dielectriclayers are analyzed. Exact solutions are obtained by solving Maxwell's equations. It isconcluded that plasmas higher than a critical value of electron plasma frequency willbe produced by an odd surface xvave SW. and less than the critical value, by twotransverse-magnetic (TM) odd LM modes, TM.. and TM...
- 社団法人日本物理学会の論文
- 1992-05-15
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